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Pulsed laser deposition of silicon containing carbon thin films

Authors
Lackner, Juergen M; Waldhauser, W.; Ebner, R.; Fian, Alexander; Jakopic, G.; Leising, Guenther; Schöberl, Thomas
Title:
Pulsed laser deposition of silicon containing carbon thin films
Seiten:
360-364
Publikationsdatum
2004-01

Publikationsreihe

Nummer
177
Proceedings
Surface and Coatings Technology
More files and links
Jahr/Monat:
2004

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