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Pulsed laser deposition of non-stoichiometric silicon nitride (SiNx) thin films

Materials
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Contributing authors of JOANNEUM RESEARCH:
DI Dr. Jürgen Lackner; DI Dr. Wolfgang Waldhauser; DI Dr. Georg Jakopic
Authors
Lackner, Juergen M; Waldhauser, W.; Ebner, R.; Beutl, M.; Jakopic, G.; Leising, Guenther; Hutter, H.; Rosner, M.
Title:
Pulsed laser deposition of non-stoichiometric silicon nitride (SiNx) thin films
Publikationsdatum
2004-09

Publikationsreihe

Nummer
79
Proceedings
Applied Physics A
More files and links
DOI-Url:
https://www.doi.org/ 10.1007/s00339-004-2838-0
Jahr/Monat:
2004
Bibtex Download

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