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Materials

Influences of the nitrogen content on the morphological, chemical and optical properties of pulsed laser deposited silicon nitride thin films

Materials
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Contributing authors of JOANNEUM RESEARCH:
DI Dr. Jürgen Lackner; DI Dr. Wolfgang Waldhauser; DI Dr. Georg Jakopic
Authors
Lackner, Juergen M; Waldhauser, W.; Berghauser, R.; Ebner, R.; Beutl, M.; Jakopic, G.; Leising, Guenther; Hutter, H.; Rosner, M.; Schöberl, Thomas
Title:
Influences of the nitrogen content on the morphological, chemical and optical properties of pulsed laser deposited silicon nitride thin films
Seiten:
225-230
Publikationsdatum
2005-03

Publikationsreihe

Nummer
192
Proceedings
Surface and Coatings Technology
More files and links
DOI-Url:
https://www.doi.org/ 10.1016/j.surfcoat.2004.04.080
Jahr/Monat:
2005
Bibtex Download

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