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Contribution of pulsed laser deposition conditions to texture, morphology and residual stresses developed in TiN thin layers

Contributing authors of JOANNEUM RESEARCH:
Authors
Major, B.; Bonarski, Jan; Waldhauser, W.; Lackner, Juergen M; Ebner, R.
Title:
Contribution of pulsed laser deposition conditions to texture, morphology and residual stresses developed in TiN thin layers
Seiten:
83-92
Publikationsdatum
2004-01

Publikationsreihe

Nummer
49
More files and links
Jahr/Monat:
2004

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