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Finite Element Simulations of Filling and Demolding in Roll-to-Roll UV Nanoimprinting of Micro- and Nanopatterns

Authors
Götz, Johannes; Alvarez Rueda, Asier; Ruttloff, Stephan; Kuna, Ladislav; Belegratis, Maria; Palfinger, Ursula; Nees, Dieter; Hartmann, Paul; Stadlober, Barbara
Title:
Finite Element Simulations of Filling and Demolding in Roll-to-Roll UV Nanoimprinting of Micro- and Nanopatterns
Seiten:
3434–3449
Publikationsdatum
2022-03

Publikationsreihe

Nummer
5
Beitrag
3
Proceedings
ACS Appl. Nano Mater.

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