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Focus image feedback-controlled 3D laser microstructuring

Materials
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Contributing authors of JOANNEUM RESEARCH:
DI Dr. Georg Jakopic
Editor*innen:
Lai, Warren Y.-C.; Ocola, Leonidas E.; Pau, Stanley
Authors
Schmidt, Volker; Kuna, Ladislav; Jakopic, Georg; Wildling, Ernst; Langer, Gregor; Leising, Günther
Title:
Focus image feedback-controlled 3D laser microstructuring
Herausgeber (Verlag):
SPIE
Seiten:
60021C
Publikationsdatum
2005

Publikationsreihe

Herausgeber(Verlag)
SPIE
Nummer
6002
Proceedings
Nanofabrication: Technologies, Devices, and Applications II
More files and links
https://doi.org/10.1117/12.631116
DOI-Url:
https://www.doi.org/ 10.1117/12.631116
Jahr/Monat:
2005
Bibtex Download

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