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Materials

Heterogeneous Integration of Metal Oxides—Towards a CMOS Based Multi Gas Sensor Device

Materials
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Contributing authors of JOANNEUM RESEARCH:
DI Dr. Martin Tscherner; DI Alexander Blümel; Dipl.-Phys. Karl Popovic
Authors
Köck, Anton; Deluca, Marco; Sosada-Ludwikowska, Florentyna; Maier, Günther; Teubenbacher, Robert Wimmer; Sagmeister, Martin; Rohracher, Karl; Wachmann, Ewald; Niehaus, Jan Steffen; Becker, Sören; Tokmak, Öznur; Schlicke, Hendrik; Blümel, Alexander; Popovic, Karl; Tscherner, Martin
Abstract:
A worldwide unique CMOS based chemical sensor device comprising an array of 8 microhotplates (µhps) for a total of 16 chemical sensors has been fabricated (Figure 1). [...]
Title:
Heterogeneous Integration of Metal Oxides—Towards a CMOS Based Multi Gas Sensor Device
Seiten:
5
Publikationsdatum
2019-06

Publikationsreihe

Nummer
14
Beitrag
1
ISSN
2504-3900
Proceedings
Proceedings
More files and links
https://www.mdpi.com/2504-3900/14/1/5
DOI-Url:
https://www.doi.org/ 10.3390/proceedings2019014005
Jahr/Monat:
2019
Bibtex Download

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