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Materials

Manufacturing of freeform micro-optical elements by mask-less laser direct write lithography and replication by imprinting

Materials
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Contributing authors of JOANNEUM RESEARCH:
Mag. Dr. Claude Leiner; Stephan Ruttloff, MSc; Dr. Frank Reil; DI Wolfgang Nemitz
Authors
Kuna, L.; Leiner, C.; Ruttloff, S.; Nemitz, W.; Reil, F.; Hartmann, P.; Wenzl, F. P.; Sommer, C.
Title:
Manufacturing of freeform micro-optical elements by mask-less laser direct write lithography and replication by imprinting
Publikationsdatum
2016

Publikationsreihe

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Jahr/Monat:
2016
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