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Multilength Scale Patterning of Functional Layers by Roll-to-Roll Ultraviolet-Light-Assisted Nanoimprint Lithography

Materials
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Contributing authors of JOANNEUM RESEARCH:
Mag.a Dr.in Ursula Palfinger; Mag.a Dr.in Barbara Stadlober; DI Johannes Götz, BSc; Dr. Dieter Nees; Mag.a Dr.in Maria R. Belegratis; Stephan Ruttloff, MSc
Authors
Leitgeb, Markus; Nees, Dieter; Ruttloff, Stephan; Palfinger, Ursula; Götz, Johannes; Liska, Robert; Belegratis, Maria R.; Stadlober, Barbara
Title:
Multilength Scale Patterning of Functional Layers by Roll-to-Roll Ultraviolet-Light-Assisted Nanoimprint Lithography
Seiten:
4926-4941
Publikationsdatum
2016

Publikationsreihe

Nummer
10
ISSN
1936-0851
More files and links
DOI-Url:
https://www.doi.org/ 10.1021/acsnano.5b07411
Jahr/Monat:
2016
Bibtex Download

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