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Materials

Properties of DLC and Nitrogen-Doped DLC Films Deposited by DC Magnetron Sputtering

Materials
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Contributing authors of JOANNEUM RESEARCH:
DI Dr. Jürgen Lackner; DI Dr. Wolfgang Waldhauser
Authors
Kahn, Markus; Menegazzo, Nicola; Mizaikoff, Boris; Berghauser, Roswitha; Lackner, Juergen M; Hufnagel, Daniel; Waldhauser, W.
Title:
Properties of DLC and Nitrogen-Doped DLC Films Deposited by DC Magnetron Sputtering
Publikationsdatum
2007-04

Publikationsreihe

Nummer
4
Proceedings
Plasma Processes and Polymers - PLASMA PROCESS POLYM
More files and links
DOI-Url:
https://www.doi.org/ 10.1002/ppap.200730701
Jahr/Monat:
2007
Bibtex Download

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