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Materials

Pulsed laser deposition: A new technique for depostion of amorphous SiOx thin films

Materials
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Contributing authors of JOANNEUM RESEARCH:
DI Dr. Jürgen Lackner; DI Dr. Wolfgang Waldhauser; DI Dr. Georg Jakopic
Authors
Lackner, Juergen M; Waldhauser, W.; Ebner, R.; Lenz, W.; Suess, C.; Jakopic, G.; Leising, Guenther; Hutter, H.
Title:
Pulsed laser deposition: A new technique for depostion of amorphous SiOx thin films
Seiten:
300–305
Publikationsdatum
2003-01

Publikationsreihe

Nummer
s 163–164
Proceedings
Surface and Coatings Technology
More files and links
DOI-Url:
https://www.doi.org/ 10.1016/S0257-8972(02)00612-6
Jahr/Monat:
2003
Bibtex Download

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