The relationship between structure and mechanical properties of hydrogenated amorphous carbon films

There is increasing interest in the relations between Raman fit parameters and the mechanical properties of diamond-like carbon films. The present work describes these relations in hydrogenated diamond-like carbon films (a-C:H) deposited by an ion beam source operated at varied discharge voltages, i.e. kinetic carbon species energies. A number of highly distinct relations between Raman fit parameters and mechanical properties are identified for the a-C:H films investigated. For example the nanohardness (H) and reduced elastic modulus (E) increase almost linearly with an increase in full width at half maximum of the G-band (FWHM (G)). The film elasticity, expressed as H3/E2 increases with increasing FWHM (G). In addition, H and E increase linearly with decreasing intensity ratio of the D-band and the G-band (ID/IG). H and E also increase with the G-band dispersion (Disp. (G)), i.e. the rate of change of the G-band position vs. excitation energy. Hydrogen contents in all films are approximately equal and range from 21.2 to 23.5at.% over the entire set of investigated samples.