Research infrastructure
Materials
Cleanroom class 6 - certified according to ISO 14644
Certified class 6 cleanroom for nanostructures and innovative electronic components and sensors
Cleanroom class 6 - certified according to ISO 14644, credit: JOANNEUM RESEARCH/Schwarzl
What are the key figures for the cleanroom at the Weiz site?
Cleanliness level: max. 35,200 particles per cubic metre, size ≥ 0.5 µm and max. 8,320 particles, size ≥ 1 µm per cubic metre and max. 293 particles ≥ 5 µm
- Air exchange primary air: 12 times room volume / h
- Air recirculation through FFUs: 40 – 60 times room volume / h
- Temperature: The setpoint for the room temperature can be set user-specifically. The current default is 22°C and must be kept within a range of +/- 1°C.
- Relative humidity: The specifications are also user-specific. The setpoint is currently 40% relative humidity and can be realised with a deviation of +/- 5% in terms of control technology.
We offer the following services and methods:
- Micro-nanostructures, mastering, analytics, feasibility studies, microelectronics test series up to 6 inches
- Nanoimprint lithography in a batch process (up to 4 x 4 inch²) under clean room conditions (UV-NIL and hot embossing NIL)
- Surface morphology using scanning electron microscopy (SEM)
- Electron beam lithography
- Photo lithography
- Reactive ion etching (RIE) O2/Ar/N2/SF6/CFu
- Surface modification medium O2/N2/NH3 -Plasma, UV
- Modular pilot line incl. glovebox cluster
Contact
Your contact
Location
MATERIALS –
Institute for Sensors, Photonics and Manufacturing Technologies
Franz-Pichler-Straße 30,
8160
Weiz
