We use a specially modified EVG770 Nanoimprint Lithography (NIL) stepper for the large-scale production of micro- and nanostructures in UV imprint resins. Together with special materials and processes, we achieve the highest precision right down to practically seamless transitions between individual structures.
Step and Repeat-Anlage, Foto: JOANNEUM RESEARCH, Robert Stadler
Features
Our offer
We offer our customers and partners research pilot lines for the development and implementation of new product ideas and manufacturing processes, from the idea to the prototype. The pilot line for roll-based micro- and nanostructuring at the MATERIALS Institute includes simulation, design and material development (coatings, imprint resins) and offers large-area structuring and structure replication from mastering to high-throughput production. The EVG770 NILStepper completes this pilot line with regard to the production of flexible working stamps for roller-based processes.
Find out more about our services in the area of Step and Repeat UV-nanoimprint lithography.
Measurement and analysis of the smallest structures, layers and components on a micro- and nanometre scale
Certified class 6 cleanroom for nanostructures and innovative electronic components and sensors
Microassembly Lab for photonic and electronic assemblies
This highly precise maskless laser system (MALA) is suitable for the production of highly complex and stepless micro-optical structures.
The lab includes flexible, rapid prototyping processes to produce a variety of structures in a wide range of materials.
We offer laser material processing and many years of expertise in materials science.
State-of-the-art development infrastructure for integrated electronic and optical design including EMC and ESD - open to industrial partners.
Our R2R-UV-NIL pilot line enables the continuous and cost-effective production of micro and nanostructures on flexible large-area film substrates for applications in lighting, photovoltaics, AR/VR, AR/VR, microfluidics, diagnostics, security, film finishing and packaging, the pharmaceutical industry and life sciences.
State-of-the-art infrastructure for light measurement and prototype production for integrated optical and electronic design - open to industrial partners.
Our laboratory includes technologies for functional plasma coating at low temperatures from atmospheric pressure to fine and high vacuum.
Printing technologies for the development of customised 2D, 2.5D and 3D printing processes
JOANNEUM RESEARCH provides innovation and technology services in the field of applied research. As a research company working on behalf of various federal provinces and regions in Austria, our expertise shapes the development of our modern society and economy – sustainably, and always with a focus on people. As a multidisciplinary team working in a flexible set-up that fosters innovation, we always live up to the highest social and scientific standards.